Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/8389
Título: | On-chip array of thermoelectric peltier microcoolers |
Autor(es): | Gonçalves, L. M. Rocha, J. G. Couto, C. Alpuim, P. Correia, J. H. |
Palavras-chave: | Telluride peltier Array telluride peltier microcooler array |
Data: | 2007 |
Editora: | IEEE |
Citação: | INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS, ACTUACTORS AND MICROSYSTEMS,14, Lyon, 2007 – “International Conference on Solid-State Sensors, Actuators and Microsystems”. [S.l. : s.n., 2007]. |
Resumo(s): | This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 88 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching on top of a silicon wafer, where the CMOS electronic circuits were previously made |
Tipo: | Artigo em ata de conferência |
URI: | https://hdl.handle.net/1822/8389 |
ISBN: | 9781424408412 |
DOI: | 10.1109/SENSOR.2007.4300599 |
Arbitragem científica: | yes |
Acesso: | Acesso aberto |
Aparece nas coleções: | DEI - Artigos em atas de congressos internacionais |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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LM_Goncalves_TRANS07_Paper_Published.pdf | 601,45 kB | Adobe PDF | Ver/Abrir |