Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/71442
Título: | A wafer-level miniaturized Michelson interferometer on glass substrate for optical coherence tomography applications |
Autor(es): | Maciel, Marino Jesus Correia Costa, C. G. Silva, Manuel Fernando Ribeiro Peixoto, Alexandre Coumiotis Moreira Wolffenbuttel, R. F. Correia, J. H. |
Palavras-chave: | Micro beam splitter Micro mirror Optical coherence tomography Saw-dicing technology |
Data: | 2016 |
Editora: | Elsevier Science SA |
Revista: | Sensors and Actuators A: Physical |
Resumo(s): | The wafer-level fabrication of a Michelson interferometer using optical MEMS technologies is presented. The intended application is in Optical Coherence Tomography (OCT). The micro fabrication involves two steps: the 45 saw dicing of glass substrate and the subsequent deposition of a dielectric multilayer and metallic layers to obtain a beam splitter and waveguide micro mirrors, respectively. The Michelson interferometer was designed for use in the near-infrared range of 800-900 nm. A 50/50 non-polarized beam splitter was obtained with only four layers (using titanium dioxide and silicon dioxide). The micro mirrors for the required spectral range were fabricated by sputtering of chromium and gold layers. The dicing cuts, which were performed with a custom-made 45 dicing blade, resulted in smooth slopes. The surface's roughness is 19.76 nm at setting and can be reduced to approximately 50% with a soft additional dicing cut. The height of the 45 degrees surfaces was approximately 400 mu m, which is in accordance with the design. The micro Michelson interferometer can be easily integrated with other optical components into a complete OCT miniaturized system. (C) 2016 Elsevier B.V. All rights reserved. |
Tipo: | Artigo |
URI: | https://hdl.handle.net/1822/71442 |
DOI: | 10.1016/j.sna.2016.03.007 |
ISSN: | 0924-4247 |
Versão da editora: | https://www.sciencedirect.com/science/article/pii/S0924424716301066 |
Arbitragem científica: | yes |
Acesso: | Acesso restrito UMinho |
Aparece nas coleções: | CMEMS - Artigos em revistas internacionais/Papers in international journals |
Ficheiros deste registo:
Ficheiro | Descrição | Tamanho | Formato | |
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mmaciel_SNA_2016.pdf Acesso restrito! | 1,14 MB | Adobe PDF | Ver/Abrir |