Utilize este identificador para referenciar este registo:
https://hdl.handle.net/1822/4385| Título: | Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge |
| Autor(es): | Marques, L. Salabas, A. Gousset, G. Alves, L. L. |
| Palavras-chave: | Modelling RF Vibrational Hydrogen Plasma |
| Data: | 21-Ago-2003 |
| Editora: | International Union of Pure and Applied Chemistry |
| Citação: | AGOSTINO, R. [et al.], ed. lit. – “ISPC : proceedings of the International Symposium on Plasma Chemistry, 16, Taormina, Italia, 2003”. [S.l.] : International Union of Pure and Applied Chemistry, 2003. p. 274. |
| Resumo(s): | In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics. |
| Tipo: | Artigo |
| URI: | https://hdl.handle.net/1822/4385 |
| Arbitragem científica: | yes |
| Acesso: | Acesso aberto |
| Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
| Ficheiro | Descrição | Tamanho | Formato | |
|---|---|---|---|---|
| ISPCV2005.pdf | 152,62 kB | Adobe PDF | Ver/Abrir |
