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https://hdl.handle.net/1822/3016| Título: | Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge |
| Autor(es): | Marques, L. Jolly, Jacques Gousset, G. Alves, L. L. |
| Palavras-chave: | Capacitively coupled discharge Hydrogen plasma |
| Data: | Jun-2002 |
| Editora: | Escampig Scientific Committee |
| Citação: | SADEGHI, N. ; SUGAI, H., ed. lit. - "Joint conference : European Conference on Atomic and Molecular Physics of Ionized Gases, 16 ; International Conference on Reactive Plasmas, 5, Grenoble, 2002". [Paris] : ESCAMPIG Scientific Committee, 2002. vol. 2. p. 291-292. |
| Resumo(s): | This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency |
| Tipo: | Artigo |
| URI: | https://hdl.handle.net/1822/3016 |
| Arbitragem científica: | yes |
| Acesso: | Acesso aberto |
| Aparece nas coleções: | CDF - FCT - Artigos/Papers (with refereeing) |
Ficheiros deste registo:
| Ficheiro | Descrição | Tamanho | Formato | |
|---|---|---|---|---|
| Escampig V2.pdf | 45,92 kB | Adobe PDF | Ver/Abrir |
